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由MForsberg著作·2004·被引用6次—Deeptrenches,usuallywithadepthlargerthanacoupleofmicrometers,aremainlyusedtoisolatedifferentdevicesanddevicegroups(wells)inCMOS/.BiCMOS ...,Theexperimentshowsthatdeeptrenchtechnologyiscapabletopromotetheperformanceo...
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AshallowtrenchisolationisemployedfortheCMOSlogicisolation.P-bodyandN-bodyimplants,asplitgateoxidemoduleandhigh-voltagewellmodules,which ...
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